| Инд. авторы: | Gritsenko V.A., Novikov Yu.N., Wong H. |
| Заглавие: | Excess Silicon at the Silicon Nitride-Thermal Oxide in Oxide-Nitride-Oxide Structures |
| Библ. ссылка: | Gritsenko V.A., Novikov Yu.N., Wong H. Excess Silicon at the Silicon Nitride-Thermal Oxide in Oxide-Nitride-Oxide Structures // The IV Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. 191 Meeting of The Electrochemical Society, 4-9 May, 1997, Montreal, Quebec, Canada, 1997. - P.374. |
| Издано: | 1997 |
| Физ. характеристика: | с.374 |