Enriching of the Si<sub>3</sub>N<sub>4</sub>-Thermal Oxide Interface by Excess Silicon in ONO Structures

Gritsenko V.A.; Morokov Yu.N.; Novikov Yu.N.; Petrenko I.P.; Svitasheva S.N.; Wong H.

Инд. авторы:	Gritsenko V.A., Morokov Yu.N., Novikov Yu.N., Petrenko I.P., Svitasheva S.N., Wong H.
Заглавие:	Enriching of the Si₃N₄-Thermal Oxide Interface by Excess Silicon in ONO Structures
Библ. ссылка:	Gritsenko V.A., Morokov Yu.N., Novikov Yu.N., Petrenko I.P., Svitasheva S.N., Wong H. Enriching of the Si₃N₄-Thermal Oxide Interface by Excess Silicon in ONO Structures // Microelectronic Engineering. - 1997. - Vol.36. - P.123-124. - ISSN 0167-9317. - EISSN 1521-3757.
Издано:	1997
Физ. характеристика:	с.123-124