| Инд. авторы: | Gadiyak G.V., Kachurin G.A., Tyschenko I.E., Tils S.A. |
| Заглавие: | Oscillating Distribution of Implanted N. in Buried in Si Layers due to Competition of Sinks |
| Библ. ссылка: | Gadiyak G.V., Kachurin G.A., Tyschenko I.E., Tils S.A. Oscillating Distribution of Implanted N. in Buried in Si Layers due to Competition of Sinks // Ninth Intern. Conf. on Ion Beam Modication of Materials. February 5-10, 1995. Canberra, 1995. - P.10.027. |
| Издано: | Canberra: , 1995 |
| Физ. характеристика: | с.10.027 |